|
Zygo® New View 200/600/5000/6000/7000 Interference Objectives, infinity corrected
Zygo® 0.5x - unique 1/2x objective that provides large FOV
Zygo® 1.0x Michelson, S/N I-10015 measured against SiC standard = 15A RMS and 75A PV $8,950
Zygo® 2.5x, Michelson, S/N 423234 - measured against SiC standard = 5A RMS and 60A PV $5,950
Zygo® 2.5x, Michelson S/N 423338 - measured against SiC standard = 3A RMS and 32A PV $5,950
Zygo® 2.5x, Michelson S/N 423481 $5,950
Zygo® 2.5x, Michelson, Low Reflectivity, S/N 423301 $6,950
Zygo® 5x, Michelson, S/N 425379 $3,500
Nikon 5x, Michelson, S/N 425318 $2,500
Nikon 5x, Michelson, S/N 425223 $2,500
Zygo® 5x, Michelson, Low Reflectivity, S/N 425389 $4,500
Zygo® 10x, Mirau S/N 100055 - measured against SiC standard = 4A RMS and 30A PV $2,950
Zygo® 50x, Mirau S/N 500040 - measured against SiC standard = 3A RMS and 70A PV $4,500
Zygo® 50x, AT (athermal), Mirau S/N I 500011 $5,500
Zygo® New View 100 Interference Objectives, non-infinity corrected
Zygo® 2.5x, Michelson (5 available) $950/ea
Zygo® 5x, Michelson (2 available) $1,500/ea
Zygo® 5x, Michelson, Low reflectivity S/N 425155 (infinity corrected objective, modified to be non-infinity for use on NV100) $2,500
Zygo® 20x, Mirau S/N 200060 - has crack at output plate, but fringes are good $1,950
ADE-PST MicroXAM Objectives
10x, Mirau
50x AT (athermal), Mirau, S/N 804 $5,500 - have athermal testing data
50x AT (athermal), Mirau, S/N 824 $5,500 - have athermal testing data
Zygo® Maxim 5600, 5700, & 5800 Interference Objectives
1x Fizeau
2x Fizeau - 3 available
10x Fizeau
Asking price: $500 each
Wyko TOPO 3D & 2D Interference Objectives
1.5x, 2,5x (Michelson)
10x, 20x, 40x (Mirau)
Veeco/Wyko NT-2000/1100/3300/8000/9000 Interference Objectives
2x Michelson, "folded' LWD
50x Mirau, infinity corrected
Wyko RST/MHT Interference Objectives - non-infinity corrected
2.5x Michelson
10x, 20x, 40x - Mirau
also have turret available
Zygo® Maxim NT Interference Objective
1.5x
VLSI STEP HEIGHT STANDARDS
88 NM, 1.8 micron, 24 micron, 50 micron
Chrome over-coated for use with optical profilers
$2,100 to $2,500
Page Last Updated: 1/31/2012 7:17:19 AM
|
|
